This product is a micro-nano level high-precision detection sensor, which has dual functions of focusing and leveling. It adopts a non-contact detection principle, with fast response speed and high measurement accuracy, and a vacuum-compatible design. It can real-time capture the height and flatness deviations of the workpiece surface, output accurate feedback signals, and is suitable for high-precision alignment and attitude adjustment of equipment such as lithography, microscopic imaging, and micro-nano processing.
Product Features:
