This product is a core scientific research equipment developed for extreme ultraviolet (EUV) lithography technology. It adopts a dual-lens group projection optical architecture, adapts to the optical transmission characteristics of the extreme ultraviolet band, and enables high-precision pattern projection and exposure imaging.

This product is a specialized high-resolution microscopic imaging instrument designed for the extreme ultraviolet (EUV) band. It integrates an EUV illumination system, a high-sensitivity imaging detection module, and an ultra-high vacuum optical cavity, breaking through the imaging limitations of traditional optical microscopy in the EUV band.

This product is a high-precision thermal parameter measurement instrument designed for vacuum environments. It integrates a vacuum acquisition and maintenance system, a precision temperature control module, and high-precision heat flux and thermophysical property detection units. Under high-vacuum / ultra-high-vacuum conditions, it can accurately measure key thermal parameters of various materials, components and vacuum devices, including thermal conductivity, thermal diffusivity, thermal emissivity, contact thermal resistance, etc.

This product is a professional metering device for characterizing the outgassing properties of materials and devices in a vacuum environment. It enables accurate detection and quantitative analysis of outgassing species, outgassing rate, and total outgassing volume of solid materials, vacuum components, and optical elements under various vacuum levels and temperature conditions.

This product is a high-precision dedicated metrology instrument for the reflectivity characterization of optical components in the extreme ultraviolet (EUV) band. Specially developed for EUV mirrors, optical coatings, micro-nano optical elements and other applications, it can accurately measure the reflectivity of samples across the full EUV band, including absolute reflectivity, relative reflectivity, angle-dependent reflectivity and other indicators.